RF Generator
i-GEN series Line up
i-GEN 1203 i-GEN 1206 i-GEN 1210 i-GEN 1303 i-GEN 1306 i-GEN 1310
Operating
Frequency
12.56MHz
±0.005%
12.56MHz
±0.005%
12.56MHz
±0.005%
13.56MHz
±0.005%
13.56MHz
±0.005%
13.56MHz
±0.005%
Max.Output
Power
300W 600W 1,000W 300W 600W 1,000W
Max.Reflect
Power
60W 120W 200W 60W 120W 200W
Input
Voltage
1Φx100~240VAC
50/60Hz
1Φx100~240VAC
50/60Hz
1Φx100~240VAC
50/60Hz
1Φx100~240VAC
50/60Hz
1Φx100~240VAC
50/60Hz
1Φx100~240VAC
50/60Hz
Current 10Amps Max 10Amps Max 20Amps Max 10Amps Max 10Amps Max 20Amps Max
Cooling Forced Air Forced Air Forced Air Forced Air Forced Air Forced Air
Control I/O Analog,
RS-232,RS-485
Analog,
RS-232,RS-485
Analog,
RS-232,RS-485
Analog,
RS-232,RS-485
Analog,
RS-232,RS-485
Analog,
RS-232,RS-485
Output
Connector
N-type N-type N-type N-type N-type N-type
Harmonics <50dBc(50ohm load)
Dimensions
(W x H x L)
240x177x423
(mm)
240x177x423
(mm)
240x177x483
(mm)
240x177x423
(mm)
240x177x423
(mm)
240x177x483
(mm)
Weight 7.5kg 9.2kg 10kg 7.5kg 9.2kg 10kg
Features
- High efficiency LDMOS RF device
- Applied high speed precise DSP control technology
- Stable output power
- Signal response quality excellent for radical change
Benefits
- Good quality of high performance
- Convenience interface system
- Raise the efficiency of product
- Cost reduction for maintenance and repair
Applications
- For sputtering metal and oxide
- OLED pre-cleaning
- For etching metal and oxide
- Reactive sputtering
- Atmospheric pressure plasma
- For reactive ion etching
- High frequency heating for medicinal
- High frequency inductive heating
Matching Network
i-MAT series Line up
Frequency 350~400KHz 2MHz 13.56MHz 27.12MHz 40MHz 60MHz
Power
Range
600W
1,000W
1,500W
2,000W
3,000W
5,000W
10kW
30kW
Cooling Method   
i-MAT 400K30L i-MAT 0230L i-MAT 1310L i-MAT 1330L i-MAT 1350L i-MAT 1375L i-MAT 13175L
Operating
frequencv
400KHz 2MHz 13.56MHz 13.56MHz 13.56MHz 13.56MHz 13.56MHz
Nominal
Power
1KW 1KW 600KW 1KW 3KW 5KW 10KW
Max.Power Depends on the
Load impedance
Depends on the
Load impedance
Depends on the
Load impedance
Depends on the
Load impedance
Depends on the
Load impedance
Depends on the
Load impedance
Depends on the
Load impedance
Max.load
Current
30A 30A 15A 30A 50A 75A 175A
Cooling Air Air Air Air Water Water Water
Input
Connector
N-type N-type N-type N-type N-type HN-type
7/16”DIN-type
7/16”DIN,
LC-TYPE
Output
Connector
HN-type
Multi-Contact
HN-type
Multi-Contact
HN-type
Multi-Contact
HN-type
Multi-Contact
HN-type
Multi-Contact
Multi-Contact Copper-plate
Multi-Contact
Control
System
i-MAT-LogicMat
Software
i-MAT-LogicMat
Software
i-MAT-LogicMat
Software
i-MAT-LogicMat
Software
i-MAT-LogicMat
Software
i-MAT-LogicMat
Software
i-MAT-LogicMat
Software
Interfaces A/D, RS-232 A/D, RS-232 A/D, RS-232 A/D, RS-232 A/D, RS-232 A/D, RS-232 A/D, RS-232
Dimensions
(W x H x L)
402x270x200
(mm)
370x240x188
(mm)
370x280x130
(mm)
370x280x130
(mm)
370x240x188
(mm)
370x240x188
(mm)
520x550x305
(mm)
Weight 8.5kg 8.5kg 7kg 8.5kg 9kg 10kg 36kg
Digital Auto Tuning
- Step Motor System
- Self diagnostics Capacitor positioning and error compensation
User-centered Software
- LogicMAT Consol program
- Preset mode is optimized for any process
- Support everytime monitoring and individual Setting mode of load / tune capacitor
Simple Design
- Customized i-MAT Matchings
- Durable and intuitive by design
- EMI-Air Cooling System of Honeycomb Filter structure
- Easy care and maintenance due to modular system
Line-up
- Various frequency of matching network from LF of HF
- Various capacity of products from 600w to 30kw
- Customized products
- Hybrid type matching network for use both RF and DC, RF blocking filter easy to maintenance externally
i-MAT LogicMat Software
Option (Remote Controller)
RF Select Switch
i-Switch series Specification
- LF 400kHz ~ 60MHz
- Channel : up to 4Ch
- Max Power : 1~3kw
- Current : Depend on frequency
- Interface : A/D 9Pin
- Power : DC 24VDC
- Input : HN, 7/16"DIN
- Output : HN, 7/16"Din, Multi-Contact
Summary
RF Select Switch one or each of a different frequency RF Generator power supply power and plasma processing chamber, each optionally is a power distribution unit to deliver.
Can be customized according to customer specifications
RF Blocking Filter
i-Filter series
Summary
i-Filter is the mixture of RF and DC Plasma Processing Damage in the RF frequency due to the loss from the DC Power Supply is a device without the protection.
Specification
- Frequency : 13MHz~ 60MHz
- Current : Depend on DC current
- Input : M-type
- Output : HN, 7/16"DIN, Multi-Contact
RF Accessory
RF & DC Power Line
Coaxial Cable sets made by Teflon coaxial cable RF-393/U
Model Coax cable Length Connector side A Connector side B
CCTO75-NN RG-393/U 0.75m N N
CCTO75-NH RG-393/U 0.75m N HN
CCT15-NH RG-393/U 1.5m N HN
CCT15-ND RG-393/U 1.5m N 7/16"DIN
CCT38-ND RG-393/U 3.8m N 7/16"DIN
CCT176-HH RG-393/U 7.6m HN HN
CCT114-HH RG-393/U 11.4m HN HN
CCT152-HD RG-393/U 15.2m HN 7/16"DIN
CCT152-DD RG-393/U 15.2m 7/16"DIN 7/16"DIN
Coaxial Cable sets made by PE coaxial cable RF-213/U
Model Coax cable Length Connector side A Connector side B
CCP36-NN RG-213/U 3.6m N N
CCP36-NH RG-213/U 3.6m N HN
CCP72-NH RG-213/U 7.2m N HN
CCP72-ND RG-213/U 7.2m N 7/16"DIN
CCT38-ND RG-213/U 10.8m N 7/16"DIN
CCP72-HH RG-213/U 7.2m HN HN
CCP108-HH RG-213/U 10.8m HN HN
CCP144-HD RG-213/U 14.4m HN 7/16"DIN
CCP144-DD RG-213/U 14.4m 7/16"DIN 7/16"DIN
Coaxial Cable sets made by Teflon coaxial cable RF-218/U
Model Coax cable Length Connector side A Connector side B
CCTG144-DL RG-218/U 14.4m 7/16"DIN LC
CCTG144-LL RG-218/U 14.4m LC LC