RF Generator
iGen series Line up
| iGen0206 | iGen0210 | iGen0406 | iGen0410 | iGen1303 | iGen1306 | iGen1310 | iGen1320 | |
|---|---|---|---|---|---|---|---|---|
| Frequency | 2Mhz ±50ppm | 4Mhz ±50ppm | 13.56Mhz ±50ppm | |||||
| Max.Output Power |
600W | 1,000W | 600W | 1,000W | 300W | 600W | 1,000W | 2,000W |
| Max.Reflect Power |
70W | 100W | 60W | 100W | 30W | 60W | 100W | 200W |
| Input Voltage |
1Φx100~240VAC 50/60Hz |
1Φx100~240VAC 50/60Hz |
1Φx100~240VAC 50/60Hz |
1Φx200~240VAC 50/60Hz |
1Φx100~240VAC 50/60Hz |
1Φx200~240VAC 50/60Hz |
3Φx200~240VAC 50/60Hz |
|
| Current | Max. 10Amp | Max. 20Amp | Max. 10Amp | Max. 20Amp | Max. 10Amp | Max. 20Amp | ||
| Cooling | Forced Air | Water Cooled | ||||||
| Control I/O | Analog, RS232 | |||||||
| Output Connector |
Coaxial N Type | Coaxial HN Type | ||||||
| Harmonics | <-50dBc (50ohm Load) | |||||||
| Dimensions (W x H x L) |
240x177x423 (mm) |
240x177x485 (mm) |
240x177x423 (mm) |
483x133x550 (mm) |
240x177x423 (mm) |
240x177x483 (mm) |
483x133x550 (mm) |
|
| Weight | 9.2kg | 10kg | 9.2kg | 18kg | 7.5kg | 9.2kg | 10kg | 21kg |
Features
- High efficiency LDMOS RF device
- Applied high speed precise DSP control technology
- Stable output power
- Signal response quality excellent for radical change
- Applied high speed precise DSP control technology
- Stable output power
- Signal response quality excellent for radical change
Benefits
- Good quality of high performance
- Convenience interface system
- Raise the efficiency of product
- Cost reduction for maintenance and repair
- Convenience interface system
- Raise the efficiency of product
- Cost reduction for maintenance and repair
Applications
- For sputtering metal and oxide
- OLED pre-cleaning
- For etching metal and oxide
- Reactive sputtering
- Atmospheric pressure plasma
- For reactive ion etching
- High frequency heating for medicinal
- High frequency inductive heating
- OLED pre-cleaning
- For etching metal and oxide
- Reactive sputtering
- Atmospheric pressure plasma
- For reactive ion etching
- High frequency heating for medicinal
- High frequency inductive heating
Matching Network
iMat series Line up
| Frequency | 400KHz | 2MHz | 4MHz | 13.56MHz | 27.12MHz | 40MHz | 60MHz | |
|---|---|---|---|---|---|---|---|---|
| Power Range |
600W | |||||||
| 1,000W | ||||||||
| 1,500W | ||||||||
| 3,000W | ||||||||
| 5,000W | ||||||||
| 10kW | ||||||||
| 30kW |
Cooling Method 
| iMatR430L | iMat0240L | iMat0440L | iMat1310L | iMat1330L | iMat1340L | iMat1350L | iMat1375L | iMat13175L | |
|---|---|---|---|---|---|---|---|---|---|
| Operating frequencv |
400KHz | 2MHz | 4MHz | 13.56MHz | |||||
| Nominal Power |
1KW | 1KW | 1KW | 600KW | 1KW | 1.5KW | 3KW | 5KW | 10KW |
| Max.Power | Depends on the Load impedance | ||||||||
| Max.load Current |
30A | 40A | 40A | 10A | 30A | 40A | 50A | 75A | 175A |
| Cooling | Forced Air | Water Cooled | |||||||
| Input Connector |
N Type | HN or 7/16” DIN Type | |||||||
| Output Connector |
N or HN or 7/16” Din or Multi Contact Type | Customized or Multi Contact Type | |||||||
| Control System |
iMat LOGIC Control Software | ||||||||
| Interfaces | RS232 | ||||||||
| Dimensions (W x H x L) |
402x270x200 (mm) |
370x240x188 (mm) |
410x234x225 (mm) |
370x280x130 (mm) |
370x240x188 (mm) |
520x550x305 (mm) |
|||
| Weight | 8.5kg | 8.5kg | 9kg | 7kg | 8.5kg | 9kg | 10kg | 36kg | |
Digital Auto Tuning
- Step Motor System
- Self diagnostics Capacitor positioning and error compensation
- Self diagnostics Capacitor positioning and error compensation
User-centered Software
- LogicMAT Consol program
- Preset mode is optimized for any process
- Support everytime monitoring and individual Setting mode of load / tune capacitor
- Preset mode is optimized for any process
- Support everytime monitoring and individual Setting mode of load / tune capacitor
Simple Design
- Customized i-MAT Matchings
- Durable and intuitive by design
- EMI-Air Cooling System of Honeycomb Filter structure
- Easy care and maintenance due to modular system
- Durable and intuitive by design
- EMI-Air Cooling System of Honeycomb Filter structure
- Easy care and maintenance due to modular system
Line-up
- Various frequency of matching network from LF of HF
- Various capacity of products from 600w to 30kw
- Customized products
- Hybrid type matching network for use both RF and DC, RF blocking filter easy to maintenance externally
- Various capacity of products from 600w to 30kw
- Customized products
- Hybrid type matching network for use both RF and DC, RF blocking filter easy to maintenance externally
i-MAT LogicMat Software
Option (Remote Controller)
RF Select Switch
i-Switch series Specification
- LF 400kHz ~ 60MHz- Channel : up to 4Ch
- Max Power : 1~3kw
- Current : Depend on frequency
- Interface : A/D 9Pin
- Power : DC 24VDC
- Input : HN, 7/16"DIN
- Output : HN, 7/16"Din, Multi-Contact
Summary
RF Select Switch one or each of a different frequency RF Generator power supply power and plasma processing chamber, each optionally is a power distribution unit to deliver.
Can be customized according to customer specifications
RF Blocking Filter
i-Filter series
Summary
i-Filter is the mixture of RF and DC Plasma Processing Damage in the RF frequency due to the loss from the DC Power Supply is a device without the protection.
Specification
- Frequency : 13MHz~ 60MHz
- Current : Depend on DC current
- Input : M-type
- Output : HN, 7/16"DIN, Multi-Contact
- Current : Depend on DC current
- Input : M-type
- Output : HN, 7/16"DIN, Multi-Contact
RF Accessory
RF & DC Power Line
Coaxial Cable sets made by Teflon coaxial cable RF-393/U
| Model | Coax cable | Length | Connector side A | Connector side B |
|---|---|---|---|---|
| CCTO75-NN | RG-393/U | 0.75m | N | N |
| CCTO75-NH | RG-393/U | 0.75m | N | HN |
| CCT15-NH | RG-393/U | 1.5m | N | HN |
| CCT15-ND | RG-393/U | 1.5m | N | 7/16"DIN |
| CCT38-ND | RG-393/U | 3.8m | N | 7/16"DIN |
| CCT176-HH | RG-393/U | 7.6m | HN | HN |
| CCT114-HH | RG-393/U | 11.4m | HN | HN |
| CCT152-HD | RG-393/U | 15.2m | HN | 7/16"DIN |
| CCT152-DD | RG-393/U | 15.2m | 7/16"DIN | 7/16"DIN |
Coaxial Cable sets made by PE coaxial cable RF-213/U
| Model | Coax cable | Length | Connector side A | Connector side B |
|---|---|---|---|---|
| CCP36-NN | RG-213/U | 3.6m | N | N |
| CCP36-NH | RG-213/U | 3.6m | N | HN |
| CCP72-NH | RG-213/U | 7.2m | N | HN |
| CCP72-ND | RG-213/U | 7.2m | N | 7/16"DIN |
| CCT38-ND | RG-213/U | 10.8m | N | 7/16"DIN |
| CCP72-HH | RG-213/U | 7.2m | HN | HN |
| CCP108-HH | RG-213/U | 10.8m | HN | HN |
| CCP144-HD | RG-213/U | 14.4m | HN | 7/16"DIN |
| CCP144-DD | RG-213/U | 14.4m | 7/16"DIN | 7/16"DIN |
Coaxial Cable sets made by Teflon coaxial cable RF-218/U
| Model | Coax cable | Length | Connector side A | Connector side B |
|---|---|---|---|---|
| CCTG144-DL | RG-218/U | 14.4m | 7/16"DIN | LC |
| CCTG144-LL | RG-218/U | 14.4m | LC | LC |
