RF Generator
iGen series Line up
iGen0206 iGen0210 iGen0406 iGen0410 iGen1303 iGen1306 iGen1310 iGen1320
Frequency 2Mhz ±50ppm 4Mhz ±50ppm 13.56Mhz ±50ppm
Max.Output
Power
600W 1,000W 600W 1,000W 300W 600W 1,000W 2,000W
Max.Reflect
Power
70W 100W 60W 100W 30W 60W 100W 200W
Input
Voltage
1Φx100~240VAC
50/60Hz
1Φx100~240VAC
50/60Hz
1Φx100~240VAC
50/60Hz
1Φx200~240VAC
50/60Hz
1Φx100~240VAC
50/60Hz
1Φx200~240VAC
50/60Hz
3Φx200~240VAC
50/60Hz
Current Max. 10Amp Max. 20Amp Max. 10Amp Max. 20Amp Max. 10Amp Max. 20Amp
Cooling Forced Air Water Cooled
Control I/O Analog, RS232
Output
Connector
Coaxial N Type Coaxial HN Type
Harmonics <-50dBc (50ohm Load)
Dimensions
(W x H x L)
240x177x423
(mm)
240x177x485
(mm)
240x177x423
(mm)
483x133x550
(mm)
240x177x423
(mm)
240x177x483
(mm)
483x133x550
(mm)
Weight 9.2kg 10kg 9.2kg 18kg 7.5kg 9.2kg 10kg 21kg
Features
- High efficiency LDMOS RF device
- Applied high speed precise DSP control technology
- Stable output power
- Signal response quality excellent for radical change
Benefits
- Good quality of high performance
- Convenience interface system
- Raise the efficiency of product
- Cost reduction for maintenance and repair
Applications
- For sputtering metal and oxide
- OLED pre-cleaning
- For etching metal and oxide
- Reactive sputtering
- Atmospheric pressure plasma
- For reactive ion etching
- High frequency heating for medicinal
- High frequency inductive heating
Matching Network
iMat series Line up
Frequency 400KHz 2MHz 4MHz 13.56MHz 27.12MHz 40MHz 60MHz
Power
Range
600W
1,000W
1,500W
3,000W
5,000W
10kW
30kW
Cooling Method   
iMatR430L iMat0240L iMat0440L iMat1310L iMat1330L iMat1340L iMat1350L iMat1375L iMat13175L
Operating
frequencv
400KHz 2MHz 4MHz 13.56MHz
Nominal
Power
1KW 1KW 1KW 600KW 1KW 1.5KW 3KW 5KW 10KW
Max.Power Depends on the Load impedance
Max.load
Current
30A 40A 40A 10A 30A 40A 50A 75A 175A
Cooling Forced Air Water Cooled
Input
Connector
N Type HN or 7/16” DIN Type
Output
Connector
N or HN or 7/16” Din or Multi Contact Type Customized or Multi Contact Type
Control
System
iMat LOGIC Control Software
Interfaces RS232
Dimensions
(W x H x L)
402x270x200
(mm)
370x240x188
(mm)
410x234x225
(mm)
370x280x130
(mm)
370x240x188
(mm)
520x550x305
(mm)
Weight 8.5kg 8.5kg 9kg 7kg 8.5kg 9kg 10kg 36kg
Digital Auto Tuning
- Step Motor System
- Self diagnostics Capacitor positioning and error compensation
User-centered Software
- LogicMAT Consol program
- Preset mode is optimized for any process
- Support everytime monitoring and individual Setting mode of load / tune capacitor
Simple Design
- Customized i-MAT Matchings
- Durable and intuitive by design
- EMI-Air Cooling System of Honeycomb Filter structure
- Easy care and maintenance due to modular system
Line-up
- Various frequency of matching network from LF of HF
- Various capacity of products from 600w to 30kw
- Customized products
- Hybrid type matching network for use both RF and DC, RF blocking filter easy to maintenance externally
i-MAT LogicMat Software
Option (Remote Controller)
RF Select Switch
i-Switch series Specification
- LF 400kHz ~ 60MHz
- Channel : up to 4Ch
- Max Power : 1~3kw
- Current : Depend on frequency
- Interface : A/D 9Pin
- Power : DC 24VDC
- Input : HN, 7/16"DIN
- Output : HN, 7/16"Din, Multi-Contact
Summary
RF Select Switch one or each of a different frequency RF Generator power supply power and plasma processing chamber, each optionally is a power distribution unit to deliver.
Can be customized according to customer specifications
RF Blocking Filter
i-Filter series
Summary
i-Filter is the mixture of RF and DC Plasma Processing Damage in the RF frequency due to the loss from the DC Power Supply is a device without the protection.
Specification
- Frequency : 13MHz~ 60MHz
- Current : Depend on DC current
- Input : M-type
- Output : HN, 7/16"DIN, Multi-Contact
RF Accessory
RF & DC Power Line
Coaxial Cable sets made by Teflon coaxial cable RF-393/U
Model Coax cable Length Connector side A Connector side B
CCTO75-NN RG-393/U 0.75m N N
CCTO75-NH RG-393/U 0.75m N HN
CCT15-NH RG-393/U 1.5m N HN
CCT15-ND RG-393/U 1.5m N 7/16"DIN
CCT38-ND RG-393/U 3.8m N 7/16"DIN
CCT176-HH RG-393/U 7.6m HN HN
CCT114-HH RG-393/U 11.4m HN HN
CCT152-HD RG-393/U 15.2m HN 7/16"DIN
CCT152-DD RG-393/U 15.2m 7/16"DIN 7/16"DIN
Coaxial Cable sets made by PE coaxial cable RF-213/U
Model Coax cable Length Connector side A Connector side B
CCP36-NN RG-213/U 3.6m N N
CCP36-NH RG-213/U 3.6m N HN
CCP72-NH RG-213/U 7.2m N HN
CCP72-ND RG-213/U 7.2m N 7/16"DIN
CCT38-ND RG-213/U 10.8m N 7/16"DIN
CCP72-HH RG-213/U 7.2m HN HN
CCP108-HH RG-213/U 10.8m HN HN
CCP144-HD RG-213/U 14.4m HN 7/16"DIN
CCP144-DD RG-213/U 14.4m 7/16"DIN 7/16"DIN
Coaxial Cable sets made by Teflon coaxial cable RF-218/U
Model Coax cable Length Connector side A Connector side B
CCTG144-DL RG-218/U 14.4m 7/16"DIN LC
CCTG144-LL RG-218/U 14.4m LC LC