DC Power Supply
Standard Gexus-series Line up
Gexus-1.5 Gexus-H3 Gexus-N6 Gexus-10 Gexus-15 Gexus-20
General Cooling Compulsive Air Cooling
Panel Power, Voltage, Current, Setpoint, ALM#, etc
Size
(W*H*D)		 483*43.5
*520mm		 483*86
*638mm		 483*150
*699 mm		 483*150
*699 mm		 483*150
*699 mm		 483*150
*770 mm
Weight 10 kg 18 kg 35 kg 35 kg 35 kg 35 kg
Intput
Condition		 Voltage 3Ø AC 180
~220V		 3Ø AC 180
~242V		 3Ø AC 180
~220V		 3Ø AC 180
~220V		 3Ø AC 180
~220V		 3Ø AC 180
~242V
Input
connector		 MS
Connector		 MS
Connector		 Terminal Terminal Terminal Terminal
Output
Condition		 Control
Method		 P,I P, V, I P,I P,I P,I P, V, I
Max
Power		 1.5kW 3kW 6kW 10kW 15kW 20kW
Max
Voltage		 DC -800V DC -800V DC -800V DC -800V DC -800V DC -800V
Max
Current		 3.75A 7.5A 15A 25A 3.75A 50A
Ignition DC -1200V
2mA		 DC -1200V
2mA		 DC -1500V
6mA		 DC -1500V
6mA		 DC -1500V
6mA		 DC -1500V
2mA
Output
Connector		 BNC-R-HV BNC-R-HV Terminal Terminal Terminal Terminal
· Special Type DC Power Supply
- Customized products
- Bias Type DC Power
Features of the GEXUS Series
1.Reliability
Through heat dissipation analyses Continuous full rating output possible
Set Accuracies of GEXUS-15 are less than 1% under constant power control
and are about 1% under constant current control, where standard maximum accuracy is 2%.
2.Minimum installation area for DC power unit
Stackable electric-power units Requiring minimum installation space
As for the installation of the power supply, the piling putting by Master/Slave is possible.
3.Introducing GEXUS-ARC
Using GEXUS-ARC Option Minimum arc energy during abnormal discharge（Less than 1/4 of a certain product）
4.Ripple
Ripple is extremely small Plasma is stabilization
· Magnetron sputtering DC Power Supply
- Realization of Small Arc-Energy with High Frequency Inverters
- Covering Wide Range Impedance
- Master/Slave Operations for Higher Power
- Application : Sputtering , hard-coat, semiconductor...
- Option : Gexus-ARC, Gexus-Controller